Charged particle beam device

Abstract

PURPOSE: To realize a charged particle beam device capable of measuring the relation between the high frequency exciting current applied to a magnetic head and the high frequency magnetic field generated thereby with high time resolving power and high time accuracy. CONSTITUTION: A current detecting resistor 4 is inserted in a magnetic head in series and the voltage generated across both terminals thereof is applied to a deflector 5. Stroboscopic pulse electron beam 11 of the same timing as the measuring time of a magnetic field is passed through the deflecting plate 5 and a current value is calculated by the conversion from the quantity of deflection thereof. By this constitution, the high frequency characteristics of a device generating a high frequency magnetic field such as the magnetic head can be more accurately evaluated in detail. COPYRIGHT: (C)1992,JPO&Japio

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    US-6744249-B2June 01, 2004Hitachi, Ltd.Method and instrument for measuring a magnetic field, a method for measuring a current waveform, and method for measuring an electric field